Published May 20, 2009
| Version v1
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TCAD Sensitivity Analysis for Device Optimization
Description
We explore the use of sensitivity analysis for technology computer-aided design (TCAD) optimization. By directly coupling device response to model parameters, our approach may be used to generate derivatives for gradient-based optimization. An example is presented for inverse modeling of a doping profile. We compare the number of simulations required, and accuracy, to a design of experiments (DOE) based optimization.
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sensitivity.pdf
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